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Volumn 373, Issue 7, 2002, Pages 656-663
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Radio frequency glow discharge optical emission spectroscopy: A new weapon in the depth profiling arsenal
a a a a a a |
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Author keywords
Aluminium oxide; Depth profiling; Optical emission spectroscopy; Radio frequency glow discharge
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Indexed keywords
EMISSION SPECTROSCOPY;
RADIO FREQUENCY AMPLIFIERS;
SILICON;
SPUTTERING;
COMPLEMENTARY ATTRIBUTES;
CHEMICAL ANALYSIS;
ALUMINUM OXIDE;
ARSENIC DERIVATIVE;
BORON;
ELEMENT;
ION;
RADIOACTIVE MATERIAL;
SILICON;
ANALYTIC METHOD;
ARTICLE;
CHEMICAL ANALYSIS;
CHEMICAL COMPOSITION;
CONCENTRATION (PARAMETERS);
DEVICE;
ELECTRICAL CONDUCTIVITY PARAMETERS;
FLAME PHOTOMETRY;
FREQUENCY ANALYZER;
OPTICAL INSTRUMENTATION;
PLASMA;
POROSITY;
PRESSURE;
SAMPLE;
SAMPLING;
TELECOMMUNICATION;
WEAPON;
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EID: 0036037908
PISSN: 16182642
EISSN: None
Source Type: Journal
DOI: 10.1007/s00216-002-1378-8 Document Type: Article |
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Times cited : (19)
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References (51)
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