A tilting procedure to enhance compositional contrast and reduce residual diffraction contrast in energy-filtered TEM imaging of planar interfaces

Micron

Volumn 33, Issue 1, 2002, Pages 39-51

  Moore, K T ^a   Stach, E A ^b   Howe, J M ^c   Elbert, D C ^a   Veblen, D R ^a  

^a JOHNS HOPKINS UNIVERSITY   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c University of Virginia   (United States)

Author keywords

Electron energy loss spectroscopy (EELS); Elemental map; Energy filtered image (EFI); Energy filtered transmission electron microscopy (EFTEM); Jump ratio image; Semiconductor interfaces; Signal to noise ratio (SNR)

Indexed keywords

ARTICLE;

EID: 0036028109     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(00)00072-X     Document Type: Article

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