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Volumn 390, Issue 1-2, 2001, Pages 217-221
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Characteristics of VHF excited hydrogen plasmas using a ladder-shaped electrode
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Author keywords
Electron temperature; Ladder shaped electrode; Plasma CVD; VHF plasma
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Indexed keywords
CARRIER CONCENTRATION;
ELECTROCHEMICAL ELECTRODES;
HYDROGEN;
TEMPERATURE MEASUREMENT;
LADDER-SHAPED ELECTRODES;
PLASMA APPLICATIONS;
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EID: 0035973363
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)00952-X Document Type: Article |
Times cited : (13)
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References (23)
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