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Volumn 390, Issue 1-2, 2001, Pages 217-221

Characteristics of VHF excited hydrogen plasmas using a ladder-shaped electrode

Author keywords

Electron temperature; Ladder shaped electrode; Plasma CVD; VHF plasma

Indexed keywords

CARRIER CONCENTRATION; ELECTROCHEMICAL ELECTRODES; HYDROGEN; TEMPERATURE MEASUREMENT;

EID: 0035973363     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00952-X     Document Type: Article
Times cited : (13)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.