Radio-frequency plasma production using a ladder-shaped antenna

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 662-665

  Kawai, Y ^a   Yoshioka, M ^a   Yamane, T ^a   Takeuchi, Y ^b   Murata, M ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b MITSUBISHI HEAVY INDUSTRIES LTD   (Japan)

Author keywords

Ladder shaped antenna; Langmuir probe; Plasma CVD; Plasma parameter; VHF plasma

Indexed keywords

ANTENNAS; PLASMA DENSITY; SUBSTRATES;

LADDER-SHAPED ANTENNAS; LANGMUIR PROBES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0033338788     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00295-9     Document Type: Article

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