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Volumn , Issue , 1992, Pages 19-24
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A micro membrane pump with electrostatic actuation
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROSTATIC DEVICES;
INTEGRATED CIRCUITS;
MEMBRANES;
MICROMACHINING;
PUMPS;
SEMICONDUCTING SILICON;
COUNTERELECTRODES;
ELECTROSTATIC ACTUATION;
ELECTROSTATIC FORCES;
MICRO MEMBRANE PUMPS;
SILICON CHIPS;
ACTUATORS;
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EID: 0027041292
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/memsys.1992.187684 Document Type: Conference Paper |
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Times cited : (145)
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References (7)
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