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Volumn 118, Issue 4, 2001, Pages 203-206
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The effect of mound roughness on the electrical capacitance of a thin insulating film
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Author keywords
A. Insulators; A. Surfaces and interfaces; A. Thin films
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Indexed keywords
CAPACITANCE MEASUREMENT;
INTERFACES (MATERIALS);
OPTICAL CORRELATION;
PRECISION ENGINEERING;
SURFACE ROUGHNESS;
THIN FILMS;
MOUND ROUGHNESS;
THIN INSULATING FILMS;
INSULATING MATERIALS;
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EID: 0035942410
PISSN: 00381098
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1098(01)00057-6 Document Type: Article |
Times cited : (17)
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References (28)
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