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Volumn 118, Issue 4, 2001, Pages 203-206

The effect of mound roughness on the electrical capacitance of a thin insulating film

Author keywords

A. Insulators; A. Surfaces and interfaces; A. Thin films

Indexed keywords

CAPACITANCE MEASUREMENT; INTERFACES (MATERIALS); OPTICAL CORRELATION; PRECISION ENGINEERING; SURFACE ROUGHNESS; THIN FILMS;

EID: 0035942410     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1098(01)00057-6     Document Type: Article
Times cited : (17)

References (28)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.