SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Physics D: Applied Physics

Volumn 34, Issue 18, 2001, Pages 2792-2797

Minimization of dry etch damage in III-V semiconductors

(4) Rahman, M a Deng, L G b Van Den Berg, J c Wilkinson, C D W a

a UNIVERSITY OF GLASGOW (United Kingdom)

b OXFORD INSTRUMENTS PLASMA TECHNOLOGY (United Kingdom)

c UNIVERSITY OF SALFORD (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; HETEROJUNCTIONS; INTERFEROMETRY; PHOTOLUMINESCENCE; PLASMA ETCHING; SEMICONDUCTOR QUANTUM WELLS;

LASER INTERFEROMETRY;

SEMICONDUCTOR MATERIALS;

EID: 0035929067 PISSN: 00223727 EISSN: None Source Type: Journal
DOI: 10.1088/0022-3727/34/18/312 Document Type: Article

Times cited : (7)

References (22)

1
- 0033740218
- (2000) Phynns. Status Solidi a , vol.178 , pp. 545
- Bay-Ityer, M.¹ Gutbrod, T.² Forchel, A.³ Knipp, P.A.⁴ Reinecke, T.L.⁵

2
- 0001582579
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 3658
- Murad, S.K.¹ Rahman, M.² Johnson, N.³ Thoms, S.⁴ Beaumont, S.P.⁵ Wilkinson, C.D.W.⁶

3
- 0000878103
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3334
- Deng, L.G.¹ Rahman, M.² Murad, S.K.³ Boyd, A.⁴ Wilkinson, C.D.W.⁵

4
- 0003099438
- (1998) Electrochem. Soc. Proc. , vol.98 , pp. 213
- Rahman, M.¹ Deng, L.G.² Boyd, A.³ Wilkinson, C.D.W.⁴ Van den Berg, J.A.⁵ Armour, D.G.⁶

5
- 0033131705
- (1999) Microelectron. Eng. , vol.46 , pp. 299
- Rahman, M.¹ Deng, L.G.² Boyd, A.³ Ribayrol, A.⁴ Wilkinson, C.D.W.⁵ Van den Berg, J.A.⁶ Armour, D.G.⁷

6
- 0000635058
- (2000) Appl. Phys. Lett. , vol.76 , pp. 2871
- Deng, L.G.¹ Rahman, M.² Wilkinson, C.D.W.³

7
- 0000845567
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 651
- Stoffel, N.G.¹

8
- 0000092506
- (1997) J. Appl. Phys. , vol.82 , pp. 2215
- Rahman, M.¹

9
- 0000408555
- (1989) J. Vac. Sci. Technol. B , vol.7 , pp. 1475
- Germann, R.¹ Forchel, A.² Bresch, M.³ Meier, H.P.⁴

10
- 0001160920
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1906
- Wong, H.F.¹ Green, D.L.² Liu, T.Y.³ Lishan, D.G.⁴ Bellis, M.⁵ Hu, E.L.⁶ Petroff, P.M.⁷ Holtz, P.O.⁸ Merz, J.L.⁹

11
- 0025418773
- (1990) Microelectron. Eng. , vol.11 , pp. 591
- Cheung, R.¹ Birnie, A.² Chapman, J.N.³ Thoms, S.⁴ Wilkinson, C.D.W.⁵

12
- 0001621675
- (1992) J. Appl. Phys. , vol.71 , pp. 3754
- Wang, P.D.¹ Foad, M.A.² Sotomayor-Torres, C.M.³ Watt, M.⁴ Cheung, R.⁵ Wilkinson, C.D.W.⁶ Beaumont, S.P.⁷

13
- 0001140827
- (1992) Appl. Phys. Lett. , vol.61 , pp. 2335
- Rahman, M.¹ Johnson, N.P.² Foad, M.A.³ Long, A.R.⁴ Holland, M.C.⁵ Wilkinson, C.D.W.⁶

14
- 4243283373
- 1991
- (1991) Nucl. Instrum. Methods Phys. Res. B , vol.59-60
- Orrmann-Rossiter, K.G.¹ Al-Bayati, A.H.² Armour, D.G.³ Donelly, S.E.⁴ Van den Berg, J.A.⁵

15
- 0001595512
- (1991) Nucl. instrum. Methods Phys. Rev. B , vol.55 , pp. 565
- Bousetta, A.¹ Van den Berg, J.A.² Valizedah, R.³ Armour, D.G.⁴ Zalm, P.C.⁵

16
- 0022152274
- (1985) Japan. J. Appl. Phys. , vol.24 , pp. 1498
- Hirayama, Y.¹ Suzuki, Y.² Okamoto, H.³

17
- 0000641776
- (1987) Appl. Phys. Lett. , vol.50 , pp. 281
- Schwarz, S.A.¹ Venkatesan, T.² Hwang, D.M.³ Yoon, H.W.⁴ Bhat, R.⁵ Arakawa, Y.⁶

18
- 0003229489
- PhD Thesis University of Glasgow, unpublished
- (1994)
- Murad, S.K.¹

19
- 0003777710
- Boca Raton, FL: CRC Press
- (1993) CRC Handbook of Physics and Chemistry
- Lide, D.R.¹

20
- 0001210416
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2355
- Chen, C.H.¹ Green, D.L.² Hu, E.L.³

21
- 0000063166
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 3684
- Chen, C.H.¹ Yu, D.G.² Hu, E.L.³

22
- 0001269706
- (1986) Phys. Rev., B , vol.33 , pp. 8410
- Stievenard, D.¹ Bourgoin, J.C.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.