Photoluminescence studies on radiation enhanced diffusion of dry-etch damage in GaAs and InP materials

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3684-3687

  Chen, Ching Hui ^a   Yu, D Ginger ^a   Hu, Evelyn L ^a   Petroff, Pierre M ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000063166     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588750     Document Type: Article

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