Stress-induced leakage current in ultrathin SiO2 layers and the hydrogen dispersive transport model

Applied Physics Letters

Volumn 78, Issue 21, 2001, Pages 3289-3291

  Houssa, M ^a,b   Stesmans, A ^a   Carter, R J ^b   Heyns, M M ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035926964     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1375003     Document Type: Article

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