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Volumn 401, Issue 1-2, 2001, Pages 124-130

Formation of TiO2 thin films by hydrolysis of Ti-tetraethoxide in ethanol: Kinetics, surface morphology, constituent phases and their formation mechanism

(2) Okudera, H a Yokogawa, Y a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Growth mechanism; Surface morphology; Titanium oxide

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; ETHANOL; HYDROLYSIS; MORPHOLOGY; REACTION KINETICS; SEMICONDUCTING SILICON; SURFACE ROUGHNESS; SURFACES; TITANIUM DIOXIDE;

ROOT MEAN SQUARE (RMS) ROUGHNESS;

THIN FILMS;

EID: 0035904909 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01596-6 Document Type: Article

Times cited : (18)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.