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Applied Surface Science

Volumn 179, Issue 1-4, 2001, Pages 316-323

XPS and factor analysis for investigation of sputter-cleaned surfaces of metal (Re, Ir, Cr)-silicon thin films

(3) Reiche, R a Oswald, S a Wetzig, K a

a IFW DRESDEN (Germany)

Author keywords

Factor analysis; Metal silicon thin films; Silicides; Sputtering artifacts; X ray photoelectron spectroscopy

Indexed keywords

CHROMIUM COMPOUNDS; ELECTRIC PROPERTIES; ELECTRONIC STRUCTURE; IRIDIUM COMPOUNDS; RHENIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SPUTTERING; SURFACE CLEANING; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; TRANSPORT PROPERTIES; X RAY PHOTOELECTRON SPECTROSCOPY;

CHROMIUM SILICIDE; FACTOR ANALYSIS; IRIDIUM SILICIDE; RHENIUM SILICIDE;

SEMICONDUCTING FILMS;

EID: 0035898757 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(01)00300-2 Document Type: Article

Times cited : (19)

References (36)

1
- 0004720608
- Pasadena, California Institute of Technology, California
- (1990) Proceedings of the 9th International Conference on Thermoelectrics , pp. 249
- Vining, C.B.¹

2
- 0031528616
- (1997) Phys. Stat. Sol. (b) , vol.201 , pp. 3
- Lange, H.¹

3
- 0001039395
- Jerusalem
- (1995) Proceedings of the 6th International Conference On Hopping and Related Phenomena , pp. 224
- Vinzelberg, H.¹ Heinrich, A.² Metz, C.³ Schumann, J.⁴

4
- 0000852809
- (1997) Fresenius J. Anal. Chem. , vol.358 , pp. 329
- Reiche, R.¹ Oswald, S.² Vinzelberg, H.³ Metz, C.⁴ Schumann, J.⁵ Heinrich, A.⁶ Wetzig, K.⁷

5
- 0000977221
- Wiley, Chichester
- (1997) Proceedings of the ECASIA 1997 - Seventh European Conference on Applications of Surface and Interface Analysis , pp. 456
- Reiche, R.¹ Oswald, S.² Thomas, J.³ Reuther, H.⁴ Dobler, M.⁵ Schumann, J.⁶ Wetzig, K.⁷

6
- 0001939144
- (1999) Fresenius J. Anal. Chem. , vol.365 , pp. 76
- Reiche, R.¹ Oswald, S.² Hofman, D.³ Thomas, J.⁴ Wetzig, K.⁵

7
- 0033888544
- (2000) Nucl. Instr. Meth. B , vol.160 , pp. 397
- Reiche, R.¹ Oswald, S.² Dobler, M.³ Reuther, H.⁴ Walterfang, M.⁵ Wetzig, K.⁶

8
- 0004091959
- Wiley, New York
- (1980) Factor Analysis in Chemistry
- Malinowski, E.R.¹ Howery, D.G.²

9
- 0031365637
- IEEE 1997th 8291, Dresden
- (1998) Proceedings of the 16th International Conference on Thermoelectrics , pp. 303
- Kurt, R.¹ Pitschke, W.² Heinrich, A.³ Schumann, J.⁴ Wetzig, K.⁵

10
- 0000678646
- (1997) Fresenius J. Anal. Chem. , vol.358 , pp. 325
- Thomas, J.¹ Schumann, J.² Pitschke, W.³

11
- 0019622512
- (1981) Surf. Interface Anal. , vol.3 , pp. 211
- Wagner, C.D.¹ Davis, L.E.² Zeller, M.V.³ Taylor, J.A.⁴ Raymond, R.H.⁵ Gale, L.H.⁶

12
- 0018436046
- (1979) Surf. Interface Anal. , vol.1 , pp. 2
- Seah, M.P.¹ Dench, W.A.²

13
- 0006226088
- (1986) J. Electron Spectrosc. Phenom. , vol.41 , pp. 145
- Koenig, M.F.¹ Grant, J.T.²

14
- 0028480733
- (1994) Surf. Interface Anal. , vol.21 , pp. 501
- Kooi, B.J.¹ Somers, M.A.J.²

15
- 0031276624
- (1997) Surf. Interface Anal. , vol.25 , pp. 942
- Oswald, S.¹ Baunack, S.²

16
- 0032591102
- (1999) J. Electron Spectrosc. Relat. Phenom. , vol.104 , pp. 161
- Reiche, R.¹ Thielsch, R.² Oswald, S.³ Wetzig, K.⁴

17
- 33744538097
- (1972) Phys. Rev. B , vol.5 , pp. 4709
- Shirley, D.A.¹

18
- 0004718627
- PhD Thesis, Technische Universität Dresden, Germany
- (2000)
- Reiche, R.¹

19
- 0024833971
- (1989) Fresenius Z. Anal. Chem. , vol.335 , pp. 643
- Bubert, H.¹ Jenett, H.²

20
- 0027942527
- (1994) Anal. Chim. Acta , vol.297 , pp. 187
- Bubert, H.¹ Korte, M.² Garten, R.³ Grallath, E.⁴ Wielunski, M.⁵

21
- 0020129901
- (1982) J. Less-Common Met. , vol.85 , pp. 27
- Jorda, J.L.¹ Ishikawa, M.² Muller, J.³

22
- 0003689862
- W.W. Scott
- (1992) Binary Alloy Phase Diagrams, Vol. 2, 2nd Edition
- Massalski, T.B.¹

23
- 36449000972
- (1995) J. Appl. Phys. , vol.78 , pp. 3902
- Gottlieb, U.¹ Lambert-Andron, B.² Nava, F.³

24
- 0024051155
- (1988) Thin Solid Films , vol.161 , pp. 197
- Krontiras, C.¹ Grönberg, L.² Suni, I.³

25
- 9744239079
- (1995) J. Appl. Phys. , vol.77 , pp. 2514
- Nguyen Tan, T.A.¹ Veuillen, J.Y.² Muret, P.³ Kennou, S.⁴ Siokou, A.⁵ Ladas, S.⁶ Razafindramisa, F.L.⁷ Brunel, M.⁸

26
- 4243706805
- (2001) Appl. Surf. Sci. , vol.179 , pp. 308-316
- Oswald, S.¹ Reiche, R.²

27
- 0004679537
- PhD Thesis, Technische Universität Dresden, Germany
- (1999)
- Kurt, R.¹

28
- 0027912261
- (1993) J. Alloys Comp. , vol.200 , pp. 99
- Allevato, C.E.¹ Vining, C.B.²

29
- 3242741763
- (1985) At. Data Nucl. Data Tables , vol.32 , pp. 1
- Yeh, J.J.¹ Lindau, I.²

30
- 0024735853
- (1989) Appl. Surf. Sci. , vol.38 , pp. 117
- Azizan, M.¹ Baptist, R.² Nguyen Tan, T.A.³ Veuillen, J.Y.⁴

31
- 0000807802
- (1997) J. Phys. Condens. Matter , vol.9 , pp. 9403
- Yarmoshenko, Y.M.¹ Shamin, S.N.² Elokhina, L.V.³ Dolgih, V.E.⁴ Kurmaev, E.Z.⁵

32
- 0028529290
- (1994) Phys. Stat. Sol. (a) , vol.145 , pp. 429
- Schumann, J.¹ Elefant, D.² Gladun, C.³ Heinrich, A.⁴ Pitschke, W.⁵ Lange, H.⁶ Henrion, W.⁷ Grötzschel, R.⁸

33
- 0021444331
- (1984) Surf. Interface Anal. , vol.6 , pp. 95
- Anthony, M.T.¹ Seah, M.P.²

34
- 0023592545
- (1987) Phys. Stat. Sol. (b) , vol.144 , pp. 759
- Möbius, A.¹

35
- 84990673706
- (1989) Phys. Stat. Sol. (b) , vol.151
- Elefant, D.¹ Gladun, C.² Heinrich, A.³ Schumann, J.⁴ Vinzelberg, H.⁵

36
- 0000908932
- (1994) Int. J. Electron. , vol.77 , pp. 301
- Gladun, C.¹ Heinrich, A.² Schumann, J.³ Pitschke, W.⁴ Vinzelberg, H.⁵

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