Preparation of iridium silicide thin films by means of electron beam evaporation

International Conference on Thermoelectrics, ICT, Proceedings

Volumn , Issue , 1997, Pages 303-306

  Kurt, R ^a   Pitschke, W ^a   Heinrich, A ^a   Schumann, J ^a   Wetzig, K ^a  

^a IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CRYSTAL OSCILLATORS; ELECTRON BEAMS; EVAPORATION; IMPURITIES; IRIDIUM COMPOUNDS; MAGNETRON SPUTTERING; MASS SPECTROMETRY; STOICHIOMETRY; SUBSTRATES; THIN FILMS; X RAY ANALYSIS;

ENERGY DISPERSIVE X RAY ANALYSIS (EDX); IRIDIUM SILICIDE THIN FILMS;

SEMICONDUCTING FILMS;

EID: 0031365637     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)