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Volumn 90, Issue 4, 2001, Pages 1703-1709
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Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0035881402
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1385355 Document Type: Review |
Times cited : (14)
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References (16)
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