Optical emission spectroscopy in cathodic arc deposition

IEEE Transactions on Plasma Science

Volumn 25, Issue 4, 1997, Pages 694-699

  Kühn, Michael ^a   Pintaske, Rainer ^a   Richter, Frank ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Cathodic arc deposition; Ion molecule collisions; Optical emission spectroscopy

Indexed keywords

ARGON; CATHODES; CHROMIUM; ELECTRIC ARCS; EMISSION SPECTROSCOPY; NITROGEN; PLASMA COLLISION PROCESSES; SPUTTER DEPOSITION; TITANIUM;

BOLTZMANN DISTRIBUTION; CATHODIC ARC DEPOSITION; OPTICAL EMISSION SPECTROSCOPY;

PLASMA APPLICATIONS;

EID: 0031211332     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.640688     Document Type: Article

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