Effective low power microwave plasma CVD of carbon nitride films

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1999, Pages 111-115

  Bardos, L ^a   Barankova, H ^a   Lebedev, Y A ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND FILMS; ELECTRON CYCLOTRON RESONANCE; MICROHARDNESS; MICROWAVES; MIXTURES; NITRIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA SOURCES; SUBSTRATES; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

CARBON NITRIDE FILMS; HARD FILMS; METALLIC ANTENNA; MODIFIED WAVEGUIDE SURFATRON;

PROTECTIVE COATINGS;

EID: 0032614411     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)