Summary Abstract: Thermomechanical properties of glow discharge deposited silicon and silicon oxide films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 6, Issue 3, 1988, Pages 1696-1698

  Jansen, F ^a   Machonkin, M A ^a  

^a XEROX CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000712558     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.575314     Document Type: Article

References (4)

1. F. Jansen, M. A. Machonkin, N. Palmieri, and D. Kuhman, J. Appl. Phys. 62, 4732 (1987).
2. A. S. Korhonen, P. L. Jones, and F. H. Cocks, Mater. Sci. Eng. 49, 127 (1981).
3. M. Grimsditch, W. Senn, and G. Winterling, Solid State Commun. 26, 229 (1978).
4. F. Jansen and M. A. Machonkin, Thin Solid Films 140, 227 (1986).