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Volumn 664, Issue , 2001, Pages
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Piezoresistive sensors on plastic substrates using doped microcrystalline silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL MICROSTRUCTURE;
ELECTRIC RESISTANCE;
OPTICAL SENSORS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYETHYLENES;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DOPING;
SUBSTRATES;
PIEZORESISTIVE SENSORS;
THIN FILMS;
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EID: 0035557328
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-664-a18.6 Document Type: Conference Paper |
Times cited : (1)
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References (14)
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