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Volumn 664, Issue , 2001, Pages

Piezoresistive sensors on plastic substrates using doped microcrystalline silicon

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; ELECTRIC RESISTANCE; OPTICAL SENSORS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYETHYLENES; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SUBSTRATES;

EID: 0035557328     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-664-a18.6     Document Type: Conference Paper
Times cited : (1)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.