Structural study and fabrication of nano-pattern on ultra thin film of Ag grown by magnetron sputtering

Journal of Physics D: Applied Physics

Volumn 34, Issue 15, 2001, Pages

  Banerjee, S ^a   Mukherjee, S ^a   Kundu, S ^a  

^a SAHA INSTITUTE OF NUCLEAR PHYSICS   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL MODIFICATION; FILM GROWTH; MAGNETRON SPUTTERING; POROSITY; SCANNING TUNNELING MICROSCOPY; SILICON; SILVER; SURFACE STRUCTURE; THICKNESS MEASUREMENT;

GRAZING INCIDENCE X RAY REFLECTIVITY; NANOPATTERN;

ULTRATHIN FILMS;

EID: 0035822579     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/34/15/101     Document Type: Article

References (18)