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Volumn 312, Issue 1-2, 1998, Pages 116-122

X-ray photoelectron spectroscopy and spectral transmittance study of stoichiometry in sputtered vanadium oxide films

Author keywords

DC magnetron sputtering; Spectral transmittance; Thin films; Vanadium oxides; XPS

Indexed keywords

FILM GROWTH; MAGNETRON SPUTTERING; OPACITY; PHOTOCONDUCTING MATERIALS; PRESSURE EFFECTS; STOICHIOMETRY; THIN FILMS; VANADIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0031648390     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0040-6090(97)00717-7     Document Type: Article
Times cited : (96)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.