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Volumn 312, Issue 1-2, 1998, Pages 116-122
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X-ray photoelectron spectroscopy and spectral transmittance study of stoichiometry in sputtered vanadium oxide films
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Author keywords
DC magnetron sputtering; Spectral transmittance; Thin films; Vanadium oxides; XPS
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Indexed keywords
FILM GROWTH;
MAGNETRON SPUTTERING;
OPACITY;
PHOTOCONDUCTING MATERIALS;
PRESSURE EFFECTS;
STOICHIOMETRY;
THIN FILMS;
VANADIUM COMPOUNDS;
X RAY PHOTOELECTRON SPECTROSCOPY;
VANADIUM OXIDE;
OPTICAL FILMS;
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EID: 0031648390
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/s0040-6090(97)00717-7 Document Type: Article |
Times cited : (96)
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References (18)
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