Integrated add/drop multiplexer (ADM) using micromachined mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4582, Issue , 2001, Pages 87-94

  Li, J ^a   Zhang, Q X ^b   Balasubramanian, N ^b   Huang, J M ^a   Liu, A Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

All optical networks; Deep RIE; MEMS; Micromirror; Optical ADM; Optical switch

Indexed keywords

ASPECT RATIO; DRY ETCHING; INDUCTIVELY COUPLED PLASMA; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; MIRRORS; MULTIPLEXING EQUIPMENT; OPTICAL SWITCHES; REACTIVE ION ETCHING; REFLECTION; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

ALL OPTICAL NETWORKS; MICROMIRROR; OPTICAL ADD-DROP MULTIPLEXER;

OPTICAL COMMUNICATION EQUIPMENT;

EID: 0035779233     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445081     Document Type: Article

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