Lensless latching-type fiber switches using silicon micromachined actuators

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 3, Issue , 2000, Pages 250-252

  Hoffmann, Martin ^a   Kopka, Peter ^a   Voges, Edgar ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CLAMPING DEVICES; ETCHING; MASKS; MICROACTUATORS; MICROMACHINING; OPTICAL SWITCHES; SILICON ON INSULATOR TECHNOLOGY; SINGLE MODE FIBERS; THIN FILMS;

LATCHING TYPE FIBER SWITCHES; WET ETCHING;

OPTICAL COMMUNICATION EQUIPMENT;

EID: 0033645003     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)