Single crystal silicon MEMS microactuator for high density hard disk drive

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 443-449

  Jianqiang, Mou ^a   Shixin, Chen ^a   Yi, Lu ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Hard disk drive; MEMS; Microactuator; Single crystal silicon

Indexed keywords

CREEP; FINITE ELEMENT METHOD; HARD DISK STORAGE; MAGNETIC HEADS; MICROACTUATORS; NATURAL FREQUENCIES; SEMICONDUCTING SILICON; SINGLE CRYSTALS; THERMAL EFFECTS;

HARD DISK DRIVES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035772541     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.449001     Document Type: Article

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