Modeling and simulation of a single crystal silicon microactuator for hard disk drive

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 350-353

  Jianqiang, Mou ^a   Shixin, Chen ^a   Yi, Lu ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Hard disk drive; Microactuator; Simulation; Single crystal silicon

Indexed keywords

HARD DISC DRIVES (HDD); SERVO ACTUATORS; THERMAL EXPANSION COEFFICIENT (TEC);

BANDWIDTH; COMPUTER SIMULATION; FINITE ELEMENT METHOD; HARD DISK STORAGE; MATHEMATICAL MODELS; MICROACTUATORS; SIGNAL PROCESSING; SILICON; THERMAL EXPANSION;

SINGLE CRYSTALS;

EID: 6344222272     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. T.Hirano, L.S. Fan, J.Q. Gao and W.Y. Lee, "MEMS Milliactuator for Hard Disk Drive Tracking Servo", Journal of Microelectromechanical System, Vol. 7, No. 2, p149-155, June 1998.
2. T. Hirano, L.S. Fan, T. Semba, et al, "Micro Actuator For Tera Storage", IEEE Micro Electro Mechanical Systems, p441-446, 1999.
3. D.A.Horsley, M.B.Cohn, A.Singh, R.Horowitz and A.P.Pisano, "Design and Fabrication of an Angular Microactuator for Magnetic Disk Drives", Journal of Microelectromechanical System, Vol. 7, No. 2, p141-148, June 1998.
4. S. Nakamura, K.Suziki, H.Fujita, T.Numazawa and H. Takada, "A One-Body MEMS Device Composed of Mutually Insulated Metallic Parts-Fabrication Process for a Microactuator for High-Density Hard Disk Drive", IEEE Micro Electro Mechanical Systems, p278-283, 1998
5. A.H.Jeans, "Analysis of the Dynamics of a Type 4 Suspension", ASME Journal of Vibration and Acoustics, p74-78, Vol.114, January 1992.