Enhanced soft x-ray reflectivity of Cr/Sc multilayers by ion assisted sputter deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4506, Issue , 2001, Pages 84-92

  Eriksson, F ^a   Johansson, G A ^b   Hertz, H M ^b   Birch, J ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Cr Sc; Ion assisted sputter deposition; Ion energy; Ion flux; Multilayer; Reflectivity; Soft x ray microscopy; Water window

Indexed keywords

ELECTROMAGNETIC WAVE REFLECTION; INTERFACES (MATERIALS); ION BEAM ASSISTED DEPOSITION; MAGNETRON SPUTTERING; MIRRORS; MULTILAYERS; OPTICAL VARIABLES MEASUREMENT; PLASMA SOURCES; SPUTTER DEPOSITION; SURFACE ROUGHNESS; THERMAL EFFECTS; X RAY MICROSCOPES;

SOFT X-RAY LASER PLASMA SOURCES; SOFT X-RAY MICROSCOPY;

X RAY OPTICS;

EID: 0035764905     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.450948     Document Type: Article

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