Asymmetric interface broadening in epitaxial Mo/W (001) superlattices grown by magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 633-638

  Svedberg, E B ^a   Birch, J ^a   Ivanov, I ^a   Munger E P ^a   Sundgren, J E ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; EPITAXIAL GROWTH; INTERFACES (MATERIALS); MAGNESIA; MAGNETRON SPUTTERING; MOLYBDENUM; MONTE CARLO METHODS; SUBSTRATES; SURFACE STRUCTURE; TUNGSTEN; X RAY DIFFRACTION;

ASYMMETRIC INTERFACE BROADENING; X RAY REFLECTIVITY;

METALLIC SUPERLATTICES;

EID: 0032028818     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581080     Document Type: Article

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