Recent progress in hybrid glass materials for micro-optical component fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4455, Issue , 2001, Pages 15-22

  Kärkkäinen, Ari H O ^a   Rogers, Jeremy D ^a   Jabbour, Ghassan E ^a   Rantala, Juha T ^a   Descour, M R ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

Hybrid glass materials; Micro optics; Photolithography; Sol gel

Indexed keywords

DIFFRACTION GRATINGS; FABRICATION; OPTICAL GLASS; OPTICAL INSTRUMENT LENSES; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SOL-GELS; SURFACE ROUGHNESS;

HYBRID GLASS MATERIAL; MAXIMUM SPECTRAL EXTINCTION COEFFICIENT; PHOTOLITHOGRAPHIC PATTERNING;

MICROOPTICS;

EID: 0035760607     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.450449     Document Type: Conference Paper

References (13)

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