Direct UV patterning of thick hybrid glass films for micro-opto-mechanical structures

Electronics Letters

Volumn 36, Issue 6, 2000, Pages 530-531

  Rantala, J T ^a   Levy, R ^b   Kivimaki L ^a   Descour, M R ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; INFRARED SPECTROPHOTOMETERS; LIGHT TRANSMISSION; LITHOGRAPHY; MICROMACHINING; OPTICAL GLASS; REFRACTIVE INDEX; SILICON WAFERS; SOL-GELS; SURFACE ROUGHNESS; THICK FILMS; ULTRAVIOLET RADIATION;

MICRO OPTICAL TABLE CONCEPT; MICRO OPTOMECHANICAL STRUCTURES; ONE STEP SPIN COATING PROCESS; ULTRAVIOLET LITHOGRAPHIC PATTERNING;

OPTICAL DEVICES;

EID: 0033892163     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20000429     Document Type: Article

References (9)

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