Micro-optical elements and their integration to glass and optoelectronic wafers

Microsystem Technologies

Volumn 6, Issue 2, 1999, Pages 41-47

  Dannberg, P ^a   Erdmann, L ^a   Bierbaum, R ^a   Krehl, A ^a   Brauer A ^a   Kley, E B ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002366081     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050173     Document Type: Article

References (12)

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6. Erdmann L (1998) PhD Thesis, University of Jena
7. Harnessing Light (1998) Committee on Optical Science and Engineering,...: Report "Harnessing Light/Optical science and engineering for the 21st century", National Academic Press, Washington, DC
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12. Terui H; Shutoh K (1998) Novel micromirror for vertical optical path conversion formed in silica-based PLC using wettability control of resin. J Lightwave Technol 16: 1631-1639