Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer

Applied Optics

Volumn 35, Issue 31, 1996, Pages 6151-6161

  Leibbrandt, G W R ^a   Harbers, G ^a   Kunst, P J ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Active component testing; Common path interferometers; Lateral shearing interferometry; Optical measurement; Phase stepping

Indexed keywords

EID: 0000611140     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.006151     Document Type: Article

References (21)

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