Four-dimensional dielectric property image obtained from electron spectroscopic imaging series

Journal of Electron Microscopy

Volumn 50, Issue 6, 2001, Pages 497-507

  Lo, Shen Chuan ^a   Kai, Ji Jung ^a   Chen, Fu Rong ^a   Chang, Li ^b   Chen, Li Chien ^a   Chiang, Cheng Cheng ^a   Ding, Peijun ^c   Chin, Barry ^c   Zhang, Hong ^c  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c APPLIED MATERIALS INC   (United States)

Author keywords

Dielectric property image; Electron spectroscopic image series; FFT interpolation; Image spectrum; Kramers Kronig analysis; Maximum entropy deconvolution

Indexed keywords

ARTICLE;

DIELECTRIC MATERIALS; DIELECTRIC PROPERTIES; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; FAST FOURIER TRANSFORMS; IMAGE RECONSTRUCTION; MAXIMUM ENTROPY METHODS; SPECTRUM ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DECONVOLUTIONS; DIELECTRIC PROPERTY IMAGE; DIELECTRICS PROPERTY; ELECTRON SPECTROSCOPIC IMAGE SERIES; FAST FOURIER TRANSFORMATION INTERPOLATION; FAST FOURIER TRANSFORMATIONS; IMAGE SPECTRUM; IMAGES SERIES; KRAMERS-KRONIG ANALYSIS; MAXIMUM ENTROPY DECONVOLUTION; MAXIMUM-ENTROPY; SPECTROSCOPIC IMAGES;

INTERPOLATION;

EID: 0035723679     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/50.6.497     Document Type: Conference Paper

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