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Volumn 5, Issue , 2001, Pages 4274-4279

Modeling and observer design for an array of electrostatically actuated microcantilevers

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ARRAYS; CONTROL SYSTEM SYNTHESIS; DIFFERENTIAL EQUATIONS; DISTRIBUTED PARAMETER CONTROL SYSTEMS; ELECTRIC CURRENT MEASUREMENT; ELECTROSTATIC ACTUATORS; INVARIANCE; MATHEMATICAL MODELS; OPTIMAL CONTROL SYSTEMS; TIME VARYING CONTROL SYSTEMS;

EID: 0035707236     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (14)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.