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Volumn 5, Issue , 2001, Pages 4274-4279
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Modeling and observer design for an array of electrostatically actuated microcantilevers
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Author keywords
[No Author keywords available]
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Indexed keywords
APPROXIMATION THEORY;
ARRAYS;
CONTROL SYSTEM SYNTHESIS;
DIFFERENTIAL EQUATIONS;
DISTRIBUTED PARAMETER CONTROL SYSTEMS;
ELECTRIC CURRENT MEASUREMENT;
ELECTROSTATIC ACTUATORS;
INVARIANCE;
MATHEMATICAL MODELS;
OPTIMAL CONTROL SYSTEMS;
TIME VARYING CONTROL SYSTEMS;
DISTRIBUTED OBSERVER;
ELECTROSTATICALLY ACTUATED MICROCANTILEVERS;
MATHIEU EQUATION;
PERIODICALLY EXCITED CANTILEVERS;
MICROSENSORS;
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EID: 0035707236
PISSN: 01912216
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (14)
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References (14)
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