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Volumn 308-310, Issue , 2001, Pages 197-201
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Evidence for H*2 trapped by carbon impurities in silicon
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Author keywords
Absorption bands; Carbon; Hydrogen; Impurity complexes; Silicon
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Indexed keywords
CARBON;
CRYSTAL DEFECTS;
CRYSTAL IMPURITIES;
DIFFUSION;
HYDROGEN;
SPECTROSCOPIC ANALYSIS;
LOCAL MODE SPECTROSCOPY;
SEMICONDUCTING SILICON;
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EID: 0035671565
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(01)00719-0 Document Type: Article |
Times cited : (27)
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References (17)
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