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Volumn 308-310, Issue , 2001, Pages 197-201

Evidence for H*2 trapped by carbon impurities in silicon

Author keywords

Absorption bands; Carbon; Hydrogen; Impurity complexes; Silicon

Indexed keywords

CARBON; CRYSTAL DEFECTS; CRYSTAL IMPURITIES; DIFFUSION; HYDROGEN; SPECTROSCOPIC ANALYSIS;

EID: 0035671565     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(01)00719-0     Document Type: Article
Times cited : (27)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.