Interaction of hydrogen with substitutional and interstitial carbon defects in silicon

Physical Review B - Condensed Matter and Materials Physics

Volumn 57, Issue 7, 1998, Pages 3887-3899

  Leary, P ^a   Jones, R ^a   Oberg S ^b  

^a UNIVERSITY OF EXETER   (United Kingdom)

^b LULEÅ UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001274593     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.57.3887     Document Type: Article

References (66)

1. R. W. Series and K. G. Barraclough, J. Cryst. Growth 60, 212 (1982).
2. G. Davies, and R. C. Newman, in Handbook on Semiconductors, edited by S. Mahajan (Elsevier, Amsterdam, 1994), Vol. 3, p. 1557.
3. M. J. Binns, S. A. McQuaid, R. C. Newman, and E. C. Lightowlers, Semicond. Sci. Technol. 8, 1908 (1993).
4. Y. Kamiura, M. Tsutsue, M. Hayashi, Y. Yamashita, and F. Hashimoto, Mater. Sci. Forum 196-201, 903 (1995).
5. A. N. Safonov, E. C. Lightowlers, G. Davies, P. Leary, R. Jones, and S. Öberg, Phys. Rev. Lett. 77, 4812 (1996).
6. R. C. Newman and J. B. Willis, J. Phys. Chem. Solids 26, 373 (1965).
7. R. C. Newman and R. S. Smith, J. Phys. Chem. Solids 30, 1943 (1969).
8. D. Windisch and P. Becker, Philos. Mag. A 58, 435 (1988).
9. P. A. Stolk, D. J. Eaglesham, H. J. Gossman, and J. M. Poate, Appl. Phys. Lett. 66, 1370 (1995).
10. A. R. Bean and R. C. Newman, Solid State Commun. 8, 175 (1970).
11. C. Kaneta, T. Sasaki, and H. Katayamayoshida, Phys. Rev. B 46, 13 179 (1992).
12. H. Yamanaka, Jpn. J. Appl. Phys. 6A, 3319 (1994).
13. R. Jones, J. Phys. C 20, L713 (1987).
14. R. Jones and S. Öberg, Semicond. Sci. Technol. 7, 27 (1992).
15. C. Kaneta and H. Katayama-Yoshida, in The Physics of Semiconductors, edited by D. J. Lockwood (World Scientific, Singapore, 1995).
16. L. C. Kimberling, P. Blood, and W. M. Gibson, Inst. Phys. Conf. Ser. 46, 273 (1978).
17. L. W. Song and G. D. Watkins, Phys. Rev. B 42, 5759 (1990).
18. G. D. Watkins and K. L. Brower, Phys. Rev. Lett. 36, 1329 (1976).
19. J. F. Zheng, M. Stavola, and G. D. Watkins, in The Physics of Semiconductors, edited by D. J. Lockwood (World Scientific, Singapore, 1994), p. 2363.
20. R. Wooley, E. C. Lightowlers, A. K. Tipping, M. Claybourn, and R. C. Newman, Mater. Sci. Forum 10-12, 929 (1986).
21. S. K. Tipping and R. C. Newman, Semicond. Sci. Technol. 2, 315 (1987).
22. M. Besson and G. G. DeLeo, Phys. Rev. B 43, 4028 (1991).
23. M. J. Burnard and G. G. DeLeo, Phys. Rev. B 47, 10 217 (1993).
24. J. Tersoff, Phys. Rev. Lett. 64, 1757 (1990).
25. R. B. Capaz, A. Dal Pino, Jr., and J. D. Joannopoulos, Phys. Rev. B 50, 7439 (1994).
26. A. Mainwood, Mater. Sci. Forum 196-201, 1589 (1995).
27. R. Jones, S. Öberg, P. Leary, and V. J. B. Torres, Mater. Sci. Forum 196-201, 785 (1995).
28. P. Leary, R. Jones, S. Öberg, and V. J. B. Torres, Phys. Rev. B 55, 2188 (1997).
29. L. W. Song, X. D. Zhan, B. W. Benson, and G. D. Watkins, Phys. Rev. B 42, 5765 (1990).
30. K. P. O’Donnell, K. M. Lee, and G. D. Watkins, Physica B 116, 258 (1983).
31. X. D. Zhan and G. D. Watkins, Phys. Rev. B 47, 6363 (1993).
32. R. Jones and S. Öberg, Phys. Rev. Lett. 68, 86 (1992).
33. C. P. Ewels, R. Jones, and S. Öberg, in Early Stages of Oxygen Precipitation in Silicon, Vol. 17 of NATO Advanced Study Institute, Series 3, High Technology, edited by R. Jones (Kluwer, Dordrecht, 1996), p. 141.
34. S. J. Pearton, J. W. Corbett, and M. Stavola, Hydrogen in Crystalline Semiconductors (Springer-Verlag, Berlin, 1992).
35. K. Murakami, N. Fukata, S. Sasaki, K. Ishioka, M. Kitajima, S. Fujimura, J. Kikuchi, and H. Haneda, Phys. Rev. Lett. 77, 3161 (1996).
36. R. E. Pritchard, M. J. Ashwin, R. C. Newman, J. H. Tucker, E. C. Lightowlers, M. J. Binns, R. Falster, and S. A. McQuaid, Phys. Rev. B (to be published).
37. A. N. Safonov and E. C. Lightowlers, Mater. Sci. Forum 143-147, 903 (1994).
38. E. C. Lightowlers, R. C. Newman, and J. H. Tucker, Semicond. Sci. Technol. 9, 1370 (1994).
39. E. C. Lightowlers, Mater. Sci. Forum 196-201, 817 (1995).
40. B. Holm, K. B. Nielsen, and B. B. Nielson, Phys. Rev. Lett. 66, 2360 (1991).
41. Y. V. Gorelinskii and N. N. Nevinnyi, Physica B 170, 155 (1991).
42. Y. Kamiura, Y. Nishiyami, anf F. Hashimoto, in Diffusion in Materials, edited by M. Koiwa, K. Hirano, H. Nakajima, and T. Okada (Trans Tech, Zurich, 1993), Vol. 95-98, p. 1001.
43. Y. V. Gorelkinski and N. N. Nevinnyi, Mater. Sci. Eng. B 36, 133 (1996).
44. J. B. Holbech, B. Bech Nielsen, R. Jones, P. Sitch, and S. Öberg, Phys. Rev. Lett. 71, 875 (1993).
45. M. Budde, B. Bech Nielsen, P. Leary, J. Goss, R. Jones, P. R. Briddon, and S. J. Breuer, S. Öberg, Phys. Rev. B (to be published).
46. S. M. Myers, Rev. Mod. Phys. 64, 559 (1992).
47. E. O. Sveinbjörnsson and O. Engström, Phys. Rev. B 52, 4884 (1995).
48. C. G. Van de Walle, P. J. H. Denteneer, Y. B. Yam, and S. T. Pantelides, Phys. Rev. B 39, 10 791 (1989).
49. A. Endroös, Phys. Rev. Lett. 63, 70 (1989).
50. Y. Kamiura, M. Yoneta, Y. Nishiyami, and F. Hashimoto, J. Appl. Phys. 72, 3394 (1992).
51. Y. Kamiura, M. Tsutsue, Y. Yamashita, and F. Hashimoto, J. Appl. Phys. 78, 4478 (1995).
52. D. M. Maric, P. F. Meier, and S. K. Estreicher, Phys. Rev. B 47, 3620 (1993).
53. Y. Zhou, R. Luchsinger, P. F. Meier, H. U. Suter, Dj. Maric, and S. K. Estreicher, Mater. Sci. Forum 196-201, 891 (1995).
54. C. Kaneta and H. Katayama-Yoshida, Y. Kamiura, M. Tsutsue, M. Hayashi, Y. Yamashita, and F. Hashimoto, Mater. Sci. Forum 196-201, 897 (1995).
55. N. S. Minaev and A. V. Mudryi, Phys. Status Solidi A 68, 561 (1981).
56. E. Irion, N. Burger, K. Thonke, and R. Sauer, J. Phys. C 8, 5083 (1985).
57. A. N. Safonov, E. C. Lightowlers, and G. Davies, Mater. Sci. Forum 196-201, 909 (1995).
58. C. P. Ewels, R. Jones, S. Oberg, J. Miro, and P. Deak, Phys. Rev. Lett. 77, 865 (1996).
59. R. C. Newman, J. H. Tucker, N. G. Semialtianos, E. C. Lightowlers, T. Gregorkiewicz, I. S. Zevenbergen, and C. A. J. Ammerlaan, Phys. Rev. B 54, 6803 (1996).
60. J. Weber and D. I. Bohne, in Early Stages of Oxygen Precipitation in Silicon (Ref. 34), p. 123.
61. G. B. Bachelet, D. R. Hamann, and M. Schlüter, Phys. Rev. B 26, 4199 (1982).
62. R. Jones, J. Phys. C 20, 271 (1987).
63. B. Bech Nielsen, L. Hoffmann, M. Budde, R. Jones, J. Goss, and S. Öberg, Mater. Sci. Forum 196-201, 933 (1995).
64. R. Jones, J. P. Goss, C. Ewels, and S. Öberg, Phys. Rev. B 50, 8378 (1994).
65. P. Deak, L. C. Snyder, M. Heinrich, C. R. Ortiz, and J. W. Corbett, Physica B 170, 253 (1991).
66. C. G. Van de Walle and J. Neugebauer, Phys. Rev. B 52, 14 320 (1995).