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Volumn , Issue , 2001, Pages 448-454
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Growth and characterization of transparent metal oxide and oxynitride gas barrier films on polymer substrates
a a a a a a |
Author keywords
Aluminium oxynitride (AlOxNy); Gas barrier; Plasma treatment; Water vapor transport
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
FILM GROWTH;
MAGNETRON SPUTTERING;
MECHANICAL PERMEABILITY;
POLYETHYLENE TEREPHTHALATES;
SUBSTRATES;
VAPORS;
METAL OXIDES;
PLASTIC FILMS;
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EID: 0035652156
PISSN: 07375921
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
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References (17)
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