Optical design of high-performance beam lines for X-ray lithography

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 6 A, 1999, Pages 3513-3521

  Toyota, Eijiro ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BERYLLIUM; COMPUTER SIMULATION; MIRRORS; OPTICAL DESIGN; X RAY LITHOGRAPHY;

BERYLLIUM WINDOW; HIGH-PERFORMANCE BEAM LINES; TOROIDAL MIRROR;

SYNCHROTRON RADIATION;

EID: 0032679853     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.3513     Document Type: Article

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