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Microelectronics Reliability

Volumn 41, Issue 11, 2001, Pages 1889-1896

Impact of interface nature on deep sub-micron Al-plug resistance

(3) Tsui, Bing Yue a Yang, Tsung Ju b Ku, Tzu N b

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONNECTORS; ELECTRIC RESISTANCE; ETCHING; SPUTTER DEPOSITION; SURFACE CLEANING; ULSI CIRCUITS;

LONG THROW SPUTTERING (LTS);

ALUMINUM COMPOUNDS;

EID: 0035501415 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/S0026-2714(01)00090-7 Document Type: Conference Paper

Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.