A universal parallel-moving platform for nano-metrology

PTB - Mitteilungen Forschen und Prufen

Volumn 107, Issue 6, 1997, Pages 417-419

  Haitjema, Han ^a   Rosielle, Nick ^a   Kotte, Gerard ^b   Steijaert, Hans ^c  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NMi Van Swinden Laboratorium   (Netherlands)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038869713     PISSN: 0030834X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. Haitjema, H: Dynamic probe calibration in the μm region with nanometric accuracy. In: Precision Engineering 19 (1996) pp 98-104
2. th intenational IMEKO symposium on Laser Metrology for Precision Measurement and Inspection in Industry, CGM-TU Denmark, 1996, pp 91-100
3. Vaughan, J.M.: The Fabry-Perot Interferometer. Bristol: IOP Publishing Ltd., 1989.