Ar and B low-energy implants into a vicinal silicon surface: A molecular dynamics study

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 183, Issue 3-4, 2001, Pages 251-259

  Mazzone, A M ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ION BOMBARDMENT; ION IMPLANTATION; KINETIC ENERGY; SEMICONDUCTING SILICON; SURFACE PHENOMENA; SURFACE STRUCTURE;

SURFACE IRRADIATION;

MOLECULAR DYNAMICS;

EID: 0035478055     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00704-2     Document Type: Article

References (20)