Invited paper: Application of scanning probe microscopy techniques in semiconductor failure analysis

Microelectronics Reliability

Volumn 41, Issue 9-10, 2001, Pages 1449-1458

  Ebersberger, B ^a   Olbrich, A ^b   Boit, C ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b INFINEON TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITANCE MEASUREMENT; DOPING (ADDITIVES); ELECTRIC POTENTIAL; IMAGING TECHNIQUES; PROCESS CONTROL;

SCANNING PROBE MICROSCOPY (SPM);

SEMICONDUCTOR DEVICES;

EID: 0035456698     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(01)00187-1     Document Type: Article

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