Oxide thickness mapping of ultrathin Al2O3 at nanometer scale with conducting atomic force microscopy

Applied Physics Letters

Volumn 78, Issue 19, 2001, Pages 2934-2936

  Olbrich, Alexander ^a   Ebersberger, Bernd ^a   Boit, Christian ^a   Vancea, Johann ^c   Hoffmann, Horst ^c   Altmann, Hans ^b   Gieres, Guenther ^b   Wecker, Joachim ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b SIEMENS AG   (Germany)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035821108     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1369152     Document Type: Article

References (13)

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