Failures in ultrathin oxides : Stored energy or carrier energy driven?

Microelectronics Reliability

Volumn 41, Issue 9-10, 2001, Pages 1367-1372

  Bruyere S ^a   Monsieur, F ^a,b   Roy, D ^a   Vincent, E ^a   Ghibaudo, G ^b  

^a STMICROELECTRONICS   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; ELECTRIC BREAKDOWN; ENERGY STORAGE; FAILURE ANALYSIS; LEAKAGE CURRENTS; OXIDES;

ULTRATHIN OXIDES;

MOS CAPACITORS;

EID: 0035456617     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(01)00142-1     Document Type: Article

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