Electrostatic microactuator and design considerations for HDD applications

IEEE Transactions on Magnetics

Volumn 35, Issue 2 PART 1, 1999, Pages 1000-1005

  Fan, L S ^a   Hirano, T ^a   Hong, J ^b   Webb, P R ^a   Juan, W H ^a   Lee, W Y ^a   Chan, S ^a   Semba, T ^a   Imaino, W ^a   Pan, T S ^b   Pattanaik, S ^b   Lee, F C ^a   McFadyen, I ^a   Arya, S ^b   Wood, R ^b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM   (United States)

Author keywords

Electrostatic microactuator; Hard disk drive; High track density

Indexed keywords

EID: 0000521570     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.753823     Document Type: Article

References (10)

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2. R. Horowitz, P. Cheung, R. T. Ho we, "Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator," Proe. of the Magnetic Recording Conference, Pittsburg, July 1995.
3. S. Nakamura, K. Suzuki, M. Ataka, H. Fujita, "An electrostatic micro actuator for a magnetic head tracking system of hard disk drives," IEEE Proc. of Transducer 97, pp.1081-1084, Chicago, June, 1997.
4. D. Horsley, D. Hernandez, R. Horowitz, A. Packard, A. P. Pisano, "Design and feedback control of electrostatic actuators for magnetic disk drives," Proc. of Solid-State Sensor and Actuator Workshop, Hilton Head, June, 1998.
5. L. -S. Fan, H. H. Ottesen, T. C. Reiley, R. W. Wood, "Magnetic recording head positioning at very high track densities using a microactuator-based two-stage servo system," IEEE Trans, on Industrial Electronics, vol, 42, 3, pp.222-233, June 1995.
6. L.-S. Fan, "Design and Fabrication of Microactuators for High Density Data Storage", IEEE Trans, on Magnetics, vol.32, no.3, 1855-1862, May 1996.
7. W. Y. Lee, J. Gao, T. Hirano, S. Chan, and L.-S. Fan, " High Aspect Ratio Etching in Polymer for Microactuator Applications," Proceedings of SPIE Micromachining and Microfabrication Process Technology III, vol. 3223, pp. 110-117, Sept 1997.
8. T. Hirano, L.-S. Fan, "Invar Electrodeposition for MEMS Applications", SPIE Proc. Micromachining and Microfabrication Process Technology, vol. 2879, 252-259, Oct. 1996.
9. T. Hirano, L. -S. Fan, J. Q. Gao, "Invar MEMS milliactuators for hard disk drive applications," Proc. of MEMS Workshop, pp. 378-382, Jan., 1997.
10. T. Hirano, L.-S. Fan, W. Y. Lee, J. Hong, W. Imaino, S. Pattanaik, S. Chan, P. Webb, and R. Horowitz "High Bandwidth, High Accuracy Rotary Micro-Actuator for Tracking Servo of a Hard-Disk Drive," to be published in IEEE/ASME Trans, on Mechatronics, Sept. 1998.