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Volumn 35, Issue 2 PART 1, 1999, Pages 1006-1010

A microactuator for head positioning system of hard disk drives

Author keywords

Hard Disk Drives; Head positioning system; Microactuator

Indexed keywords


EID: 0001097451     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.753824     Document Type: Article
Times cited : (35)

References (10)
  • 1
    • 0029733584 scopus 로고    scopus 로고
    • Design, Fabrication, Position Sensing, and Control of an Electrostatically-driven Polysilicon Microactuator
    • Jan.
    • P.Cheung, R.Horowitz and R.T.Howe, "Design, Fabrication, Position Sensing, and Control of an Electrostatically-driven Polysilicon Microactuator", IEEE Transaction on Magnetics, 32-1, pp. 122-128., Jan. 1996
    • (1996) IEEE Transaction on Magnetics , vol.32 , Issue.1 , pp. 122-128
    • Cheung, P.1    Horowitz, R.2    Howe, R.T.3
  • 2
    • 0029327467 scopus 로고
    • Magnetic Recording Head Positioning for Very High Track Densities Using a Microactuator-Based, Two-Stage Servo System
    • Mar.
    • L-S.Fan, H.H.Ottesen, T.C.Reiley, and R.W.Wood, "Magnetic Recording Head Positioning for Very High Track Densities Using a Microactuator-Based, Two-Stage Servo System", IEEE Transaction on Industrial Electronics, 42-3, pp. 222-233. Mar. 1995
    • (1995) IEEE Transaction on Industrial Electronics , vol.42 , Issue.3 , pp. 222-233
    • Fan, L.-S.1    Ottesen, H.H.2    Reiley, T.C.3    Wood, R.W.4
  • 3
    • 0029755924 scopus 로고    scopus 로고
    • Transverse Mode Electrostatic Microactuator for MEMS-Based HDD Sliders
    • San Diego, U.S.A., 11-15 Feb.
    • T.Imamura, T.Koshikawa, and M.Katayama, "Transverse Mode Electrostatic Microactuator for MEMS-Based HDD Sliders", Proc. of IEEE the 9th Annual Int. Workshop on MEMS, San Diego, U.S.A., 11-15 Feb. 1996, pp. 216-221.
    • (1996) Proc. of IEEE the 9th Annual Int. Workshop on MEMS , pp. 216-221
    • Imamura, T.1    Koshikawa, T.2    Katayama, M.3
  • 5
    • 0030247108 scopus 로고
    • Micro Electrostatic Actuators in Dual-Stage Disk Drives with High Track Density
    • May
    • Y.Tang, S.X.Chen and T.S.Low, "Micro Electrostatic Actuators In Dual-Stage Disk Drives With High Track Density", IEEE Transaction on Magnetics, 32-5, pp. 3851-3853, May 1995.
    • (1995) IEEE Transaction on Magnetics , vol.32 , Issue.5 , pp. 3851-3853
    • Tang, Y.1    Chen, S.X.2    Low, T.S.3
  • 7
    • 85010105965 scopus 로고    scopus 로고
    • On a Bi-directional Driving Electrostatic Actuator
    • Dec. in Japanese
    • S.Nakamura and H.Fujita, "On a Bi-directional Driving Electrostatic Actuator", Trans, on IEEJ, 117-E, pp. 633-636, Dec. 1997. in Japanese.
    • (1997) Trans, on IEEJ , vol.117 E , pp. 633-636
    • Nakamura, S.1    Fujita, H.2
  • 8
    • 0029419192 scopus 로고
    • Advanced silicon etching using high density plasmas
    • J.K.Bhardwaji and H.Ashraf, "Advanced silicon etching using high density plasmas", SPIE Proc., 2639, pp. 224-233, 1995.
    • (1995) SPIE Proc. , vol.2639 , pp. 224-233
    • Bhardwaji, J.K.1    Ashraf, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.