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Volumn 34, Issue 4 PART 1, 1998, Pages 1907-1909
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A high bandwidth piezoelectric suspension for high track density magnetic data storage devices
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Author keywords
Dual stage servo system; Microactuator; Piezoe ectric suspension; Planar piezoelectric actuator
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Indexed keywords
ACTUATORS;
BANDWIDTH;
CONTROL NONLINEARITIES;
COST EFFECTIVENESS;
MICROELECTROMECHANICAL DEVICES;
PIEZOELECTRIC DEVICES;
SERVOMECHANISMS;
DUAL STAGE SERVO SYSTEMS;
MICROACTUATORS;
PIEZOELECTRIC SUSPENSIONS;
PLANAR PIEZOELECTRIC ACTUATORS;
VOICE COIL MOTOR (VCM) ACTUATORS;
MAGNETIC STORAGE;
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EID: 0032114937
PISSN: 00189464
EISSN: None
Source Type: Journal
DOI: 10.1109/20.706739 Document Type: Article |
Times cited : (23)
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References (6)
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