Peel-off probe: A cost-effective probe for electrical atomic force microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4175, Issue 1, 2000, Pages 50-59

  Hantschel, T ^a,b   Slesazeck, S ^a   Duhayon, N ^a   Xu, M ^a   Vandervorst, W ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

AFM; Full metal probe; Metal tip; peel of; Probe

Indexed keywords

ETCHING; LITHOGRAPHY; METALLIZING; PROBES; SEMICONDUCTING INDIUM PHOSPHIDE; SILICON WAFERS;

FULL METAL PROBES; PEEL-OFF PROBES;

ATOMIC FORCE MICROSCOPY;

EID: 0034543789     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.395612     Document Type: Article

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