Mounting of moulded AFM probes by soldering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4175, Issue 1, 2000, Pages 62-73

  Hantschel, T ^a,d   Pape, U ^b   Slesazeck, S ^a   Niedermann, P ^c   Vandervorst, W ^a,d  

^a IMEC   (Belgium)

^b Fraunhofer Institute Reliability and Microintegration   (Germany)

^c CSEM   (Switzerland)

^d UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

AFM; Mounting; Probe; soldering

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; METALLIZING; MICROELECTRONICS; MOUNTINGS; PROBES; SOLDERING; SURFACE MOUNT TECHNOLOGY; TIN ALLOYS; TITANIUM ALLOYS;

ELECTRICAL PROBES;

ATOMIC FORCE MICROSCOPY;

EID: 0034538609     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.395613     Document Type: Article

References (0)