Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 825-831

  Barth, W ^a   Debski, T ^a   Abedinov, N ^a   Ivanov, T ^a   Heerlein, H ^a   Volland, B ^a   Gotszalk, T ^a,e   Rangelow, I W ^a   Torkar, K ^b   Fritzenwallner, K ^b   Grabiec, P ^c   Studzinska K ^c   Kostic, I ^d   Hudek, P ^d  

^a UNIVERSITY OF KASSEL   (Germany)

^b Space Research Institute of the Austrian Academy of Sciences ^*  (Germany)

^c Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

^d INSTITUTE OF CHEMISTRY   (Slovakia)

^e WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Atomic force microscopy; Atomic force microscopy space application; Piezoresistive cantilever sensors

Indexed keywords

ATOMIC FORCE MICROSCOPY; EXTRATERRESTRIAL COMMUNICATION LINKS; IMAGING TECHNIQUES; MANOMETERS; SPACE APPLICATIONS;

COMETARY DUST PARTICLES;

SENSORS;

EID: 0035450094     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00558-5     Document Type: Article

References (9)