High-resolution MOS magnetic sensor with thin oxide in standard submicron CMOS process

Sensors and Actuators, A: Physical

Volumn 57, Issue 1, 1996, Pages 9-13

  Yang, Hong Ming ^a   Huang, Yu Chung ^a   Lei, Tan Fu ^a   Lee, Chung Len ^a   Chao, Shu Chi ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

CMOS; Magnetic sensors; MOS

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC CURRENTS; INTEGRATED CIRCUIT MANUFACTURE; MAGNETIC DEVICES; MOS DEVICES; OXIDES; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SENSITIVITY ANALYSIS;

CMOS PROCESS; GATE OXIDES; MAGNETIC SENSORS;

SENSORS;

EID: 0030261596     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01327-1     Document Type: Article

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