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Journal of Micromechanics and Microengineering

Volumn 11, Issue 5, 2001, Pages 555-560

Parallel-plate electrostatic actuation with vertical hinges

(2) Gel, M a Shimoyama, I a

a UNIVERSITY OF TOKYO (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRODES; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROACTUATORS; MICROMACHINING; MICROSTRUCTURE; NATURAL FREQUENCIES; POLYIMIDES; SILICON WAFERS; SUBSTRATES; SURFACE STRUCTURE;

MICROACTUATING STRUCTURE; PARALLEL-PLATE CAPACITOR; PARALLEL-PLATE ELECTROSTATIC ACTUATION; SURFACE MICROMACHINING; VERTICAL HINGES;

MICROELECTRONIC PROCESSING;

EID: 0035443368 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/11/5/317 Document Type: Article

Times cited : (4)

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