Reshaping technique for MOEM system fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3513, Issue , 1998, Pages 182-190

  Okyar, Murat M ^a   Sun, Xi Qing ^a   Carr, William N ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROMACHINING; MICROOPTICS; MIRRORS; OPTOELECTRONIC DEVICES;

MICROOPTOELECTROMECHANICAL (MOEM) SYSTEMS; RESHAPING TECHNIQUE;

MICROELECTROMECHANICAL DEVICES;

EID: 0032291261     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)